Atom Probe Tomography & Applications
Atom Probe Tomography (APT) is used to analyze the composition of solid materials and thin films by field evaporating individual ions from the surface of the material with a voltage or laser pulse. By combining ToF mass spectrometry with 3D position information, a 3D model of the specimen can be created, providing sub-nm spatial resolution.
Optimized for localized chemical analysis, APT has been used in many applications including:
• Semiconductors including silicon and III-V technology,
• Metallurgy including steels and other alloys,
• Ceramics and oxides, making APT an extremely versatile technique able to support various elements of R&D for academia, government, and industry. A selected set of applications will be presented.
10:30 – Introduction to the APT technique
11:00 – A survey of applications from various research fields
11:30 – Q&A session
Speaker:Thomas F. Kelly received his B.S. in Mechanical Engineering with highest honors from Northeastern University in 1977. He received a Ph.D. in Material Science from M.I.T in 1981. Tom joined the faculty of the Department of Metallurgical and Mineral Engineering of the University of Wisconsin-Madison in January 1983. He was a Full Professor from 1994 until his departure in 2001. Tom founded Imago Scientific Instruments now part of CAMECA to commercialize the atom-probe microscope. His invention, the Local Electrode Atom Probe, or LEAP, captures an atom-by-atom “picture” of a material and renders that image on a computer screen in 3-D.